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DeviceNet compatible mass flow controller Product List

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DeviceNet compatible mass flow controller MC-5000L

It is a super high-performance mass flow controller compatible with DeviceNet.

Mass flow controller compatible with DeviceNet, adopting our unique self-temperature correction sensor (patented in the U.S. and Japan) and supporting various surface mount standards (1.125 inches). 【Features】 ○ Digital mass flow controller with DeviceNet interface (SEMI E54, ODVA SEMI SIG MFC Profile) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Operates on a single power supply of +11 to 24V DC ○ Supports various surface mount standards (SEMI STD.) ○ Adopts our unique self-temperature correction sensor (patented in the U.S. and Japan) ○ Connector type (horizontal or vertical) selectable ○ Fully digital operation ○ Ultra-high performance 1.125-inch width ○ Compatible with surface mount gas interface *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control
  • DeviceNet compatible mass flow controller

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